A MicroWriter ML® 3 Baby Plus has been successfully installed at the Faculty of Materials and Engineering, Phenikaa University, Vietnam. The research group led by Prof. Phuong Dinh Tam is focusing on development of materials for microelectronics technology and nanoelectronics technology. These include low-dimensional semiconductor materials and materials with high dielectric constant which can be used in field-effect transistors. The MicroWriter ML® 3 Baby Plus, fitted with two different resolution beams (1um and 5um) for exposures and the 405nm exposure light source, will continue to assist Prof. Tam’s group to further advance in these research topics.
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