A new MicroWriter ML(R) 3 Pro system has been installed at the Laboratoire PMC in Palaiseau on the outskirts of Paris, France. The system is equipped with Dual Wavelength light-sources, offering both 365nm and 405nm exposure wavelengths, providing access to a wide range of photoresists, as well as a back-side camera for alignment of features on the front and back of a wafer. The machine will assist the researchers in their Condensed Matter Physics research.
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