A new MicroWriter ML®3 Pro system has been installed in the research group of Dr Viktoryia Zolatanosha at the Institute for Photonic Quantum Systems, University of Paderborn, Germany. This is a dual wavelength system offering both 405nm and 385 nm light sources, with a back-side camera for aligning features on the front and back side of the wafer and with 5 resolutions (5um, 2um, 1um, 0.6um and 0.4um). Dr Zolatanosha’s group specialises in the epitaxial fabrication of semiconductor quantum dot nanostructures for quantum communication applications. The ML®3 Pro is a direct-write, maskless lithography system which is well-suited to the precision nanofabrication demands of her group’s research.
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