A dual-wavelength MicroWriter ML3 Pro has been installed in the Quantum Spintronics Group of Professor Ssu-Yen Huang (黃斯衍) in the Department of Physics at National Taiwan University. The system writes at both 365 nm and 405 nm and offers four resolution settings, from 5 um down to 0.6 um, so the group can match each layer to the resist and feature size it needs without changing tools. Being direct-write and maskless, it takes the group from a layout change to an exposed substrate on the same day, with no mask order in between.
The group works on spin-dependent thermal and electrical transport, spin injection into heterostructures, and the interplay between superconductivity and magnetic ordering. All of this depends on cleanly patterned micro and nanoscale devices, often in small batches that change from run to run.
This is the second MicroWriter in the building. The first was installed about 18 months ago for Dr Shao-Yu Chen (陳劭宇) at the Center for Condensed Matter Sciences, whose Artificial Low-Dimensional Quantum Materials Physics Lab works on two-dimensional material devices, Raman spectroscopy and exciton many-body physics. Most of the people now using the new Pro learned the tool on that system, so it went into routine use straight after handover, and the two instruments together give the building the capacity to keep both groups running.
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